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Processing Tools

  • Evaporation

  • RTA

  • Contact aligner

  • RIE

  • ALD

  • UV-ozone

  • Wet bench

Layout/Simulation Tools

  • Laker

  • Silivaco

  • Sentaurus

Measurement Tools

  • Keysight B1505A

  • Keysight B1500A

  • Tektronix 371A

  • Agilent 4145 CV

  • Double pulse switching test

  • Hall effect measurement system

  • Spectrometer

  • Probe station with 6-inch thermal chuck

  • Low temperature measurement system

  • High temperature oven

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