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Wide Bandgap Semiconductor Lab
Institute of Electronics Engineering
National Tsing Hua University
Processing Tools
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Evaporation
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RTA
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Contact aligner
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RIE
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ALD
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UV-ozone
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Wet bench
Layout/Simulation Tools
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Laker
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Silivaco
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Sentaurus
Measurement Tools
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Keysight B1505A
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Keysight B1500A
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Tektronix 371A
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Agilent 4145 CV
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Double pulse switching test
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Hall effect measurement system
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Spectrometer
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Probe station with 6-inch thermal chuck
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Low temperature measurement system
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High temperature oven
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